Used PLASMA-THERM Tegal

Ends 06/17 - To see full details and additional photos please contact us at marketing@govdeals.com with QAL#7547-4216

Location: Tempe, Arizona

Description:

Fully operational Tegal 901 for 150 mm wafers for sale.

*Tegal 901 reactive ion etcher (ASU Asset # 6148173, Tegal 901 reactive ion etcher, serial number D28985930T1). System has been in use at ASU since 2005 and was purchased used. System is functioning and does not include roughing pump or chiller. System includes monitor upgrade to LCD screen (not represented in the attached pictures).